Micromachined Silicon Microprobes For Cns Recording And Stimulation

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Bibliographic Details
Published in[1990] Proceedings of the Twelfth Annual International Conference of the IEEE Engineering in Medicine and Biology Society pp. 2334 - 2335
Main Authors Wise, K.D., Najafi, K., Ji, J., Hetke, J.F., Tanghe, S.J., Hoogerwerf, A., Anderson, D.J., BeMent, S.L., Ghazzi, M., Baer, W., Hull, T., Yang, Y.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1990
Subjects
Built-in self-test
Circuits
Conductors
Dielectric substrates
Geometry
Impedance
Microelectrodes
Probes
Shape control
Silicon
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ISBN:0879425598
9780879425593
DOI:10.1109/IEMBS.1990.692311