Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

An integrated optical micro-displacement sensor has been developed that uses the beam diverging from a laser diode. It can measure the distance traveled relative to an external reflective mirror. The measurement resolution is as low as of the order of 0.01 /spl mu/m It is 0.5 by 0.5 mm. Three of the...

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Bibliographic Details
Published in1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369) pp. II/47 - II/48
Main Authors Sawada, R., Higurashi, E., Itoh, T., Tsubamoto, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1998
Subjects
Actuators
Diode lasers
Integrated optics
Laser beams
Mirrors
Optical sensors
Optical waveguides
Photodiodes
Polyimides
Space exploration
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Summary:An integrated optical micro-displacement sensor has been developed that uses the beam diverging from a laser diode. It can measure the distance traveled relative to an external reflective mirror. The measurement resolution is as low as of the order of 0.01 /spl mu/m It is 0.5 by 0.5 mm. Three of these sensors can be incorporated into the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions. This sensor basically consists of a laser diode, monolithically fabricated photodiodes, and a fluorinated polyimide waveguide for converging the light beam.
ISBN:0780349539
9780780349537
DOI:10.1109/LEOSST.1998.689723