Multilevel Metal Interconnect For VLSI Circuits Using Polyimide Dielectrics
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Published in | Conference Proceedings Southeastcon '81 pp. 12 - 16 |
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Main Author | |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
1981
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Subjects | |
Online Access | Get full text |
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DOI: | 10.1109/SECON.1981.673389 |
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