Modeling of MOVPE GaAs Growth Assuming Thermodynamic Equilibrium at The Growth Front: (C/sub 2/H/sub 5/)/sub 2/GaCl and AsH/sub 3
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Published in | Sixth International Conference Metalorganic Vapor Phase Epitaxy pp. 112 - 113 |
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Main Authors | , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
1992
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Subjects | |
Online Access | Get full text |
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ISBN: | 9780879426521 0879426527 |
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DOI: | 10.1109/MOVPE.1992.664967 |