Combination of modeling and simple real-time measurements to control plasma-surface interaction processes

• Published in: 2012 Abstracts IEEE International Conference on Plasma Science p. 3P-110
• Main Authors: Greb, A., Niemi, K., O'Connell, D., Gans, T., Ennis, G. J., MacGearailt, N.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.07.2012
• Subjects: Ions; Monitoring; Numerical models; Plasma measurements; Plasmas; Process control; Surface treatment

The increasing complexity in industrial plasma processing demands new strategies for process control and monitoring. The energy transport mechanisms in the interface region between non-thermal low-pressure plasma and surface are of particular importance. Measurements of the "in situ" surfa...