Nanoporous silicon combustion process for mems
Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the combustion process for jet-propulsion microsystems. The pendulum systems with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in...
Saved in:
Published in | 2011 21st International Crimean Conference "Microwave & Telecommunication Technology" pp. 761 - 762 |
---|---|
Main Authors | , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.09.2011
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the combustion process for jet-propulsion microsystems. The pendulum systems with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in the range of 1-5 mN·s. |
---|---|
ISBN: | 9781457708831 1457708833 |