Nanoporous silicon combustion process for mems

Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the combustion process for jet-propulsion microsystems. The pendulum systems with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in...

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Bibliographic Details
Published in2011 21st International Crimean Conference "Microwave & Telecommunication Technology" pp. 761 - 762
Main Authors Lazarouk, S. K., Dolbik, A. V., Labunov, V. A.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2011
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Summary:Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the combustion process for jet-propulsion microsystems. The pendulum systems with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in the range of 1-5 mN·s.
ISBN:9781457708831
1457708833