Monte Carlo simulation of electron swarms in SF/sub 6/ and N/sub 2/ gas mixtures

• Published in: International Conference on Plasma Sciences (ICOPS) p. 232
• Main Authors: Dincer, M.S., Aydin, T.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 1993
• Subjects: Electron mobility; Ionization; Sulfur hexafluoride
• ISBN: 0780313607; 9780780313606
• ISSN: 0730-9244; 2576-7208
• DOI: 10.1109/PLASMA.1993.593631

Summary form only given. Electron swarm behavior in SF/sub 6/+N/sub 2/ mixtures is analyzed for SF/sub 6/ partial pressures of 0%, 20%, 40%, 60%, 80%, and 100% over the E/N range from 240 to 600 Td (1 Td=1/spl times/10/sup -17/ Vcm/sup 2/) using a Monte Carlo simulation technique with recent collision cross-section data. A free-flight time model is adopted. The mixture gas number density N is assumed to be equal to 3.32/spl times/10/sup 16//cm/sup -3/ (1 Torr at 20/spl deg/C). The computer simulation completely model is the electron swam, taking into account the electrons injected into the swarm due to impact ionization and loss from the swarm as a result of attachment processes. At a given E/N, electron energy distributions, mean energy, time-of-flight drift velocities, and ionization, attachment, and effective ionization coefficients are evaluated with respect to the partial pressure of SF/sub 6/ in the mixture.