Improved MEMS based FT-IR spectrometer

We discuss recent improvements of our MEMS-based FT-IR spectrometer. A novel MEMS actuator design of the translational mirrors features an increased mirror surface of 7 mm 2 and enables larger translation amplitudes (up to plusmn250 mum), leading to improved performance of the spectrometer. Furtherm...

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Bibliographic Details
Published in2009 International Symposium on Optomechatronic Technologies pp. 116 - 121
Main Authors Tortschanoff, A., Lenzhofer, M., Frank, A., Kenda, A., Sandner, T., Schenk, H.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2009
Subjects
Actuators
Circuits
closed loop
FT-IR
Infrared spectra
MEMS
Michelson interferometer
Microelectromechanical devices
Micromechanical devices
Mirrors
Optimal control
Robust control
Signal generators
Spectroscopy
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Summary:We discuss recent improvements of our MEMS-based FT-IR spectrometer. A novel MEMS actuator design of the translational mirrors features an increased mirror surface of 7 mm 2 and enables larger translation amplitudes (up to plusmn250 mum), leading to improved performance of the spectrometer. Furthermore we present a new method for accurate position detection of the MEMS device, thus enabling the implementation of closed-loop control. A dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zero-crossing position of the mirror. The implementation of a closed-loop control ensures optimally stable MEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions allowing building robust MEMS-based Fourier-transform infrared (FT-IR) spectrometers with large mechanical amplitudes and thus good spectral resolutions.
ISBN:9781424442096
1424442095
DOI:10.1109/ISOT.2009.5326109