2D-spatiotemporal structure of ICP reactor

Summary form only given. Practical application for material processing has given us a renewed interest in the study of an inductively coupled plasma (ICP) reactor to perform at large scale and high density plasma under low pressure condition. In previous papers, we modeled and discussed the one dime...

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Bibliographic Details
Published inInternational Conference on Plasma Science (papers in summary form only received) p. 167
Main Authors Kamimura, K., Makabe, T., Nakano, N., Nakagami, S.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1995
Subjects
Coils
Electrons
Equations
Inductors
Large-scale systems
Magnetic fields
Nuclear and plasma sciences
Plasma applications
Space charge
Spatiotemporal phenomena
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Summary:Summary form only given. Practical application for material processing has given us a renewed interest in the study of an inductively coupled plasma (ICP) reactor to perform at large scale and high density plasma under low pressure condition. In previous papers, we modeled and discussed the one dimensional profiles, in order to understand the spatiotemporal discharge structure and sustaining mechanism of a collision dominated ICP reactor. We have now developed a two dimensional model considering radial and axial directions and discuss the spatiotemporal structure. The ICP reactor used in this study is a cylindrical tube in a diameter of 10 cm with three induction coils, tightly wound around the side wall. Each coil can be driven at 13.56 MHz independently.
ISBN:0780326695
9780780326699
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.1995.531635