Development and characterization of micro-mechanical gratings for optical modulation

Two types of micro-electro-mechanical gratings have been designed for use as optical modulators. The gratings have been fabricated and experimentally characterized, yielding excellent results. Micro-electro-mechanical gratings are possible candidates for applications such as intra-cavity switches fo...

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Bibliographic Details
Published inProceedings of Ninth International Workshop on Micro Electromechanical Systems pp. 222 - 227
Main Authors Sene, D.E., Grantham, J.W., Bright, V.M., Comtois, J.H.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1996
Subjects
Actuators
Diffraction gratings
Electrodes
Electrons
Electrostatics
Optical design
Optical diffraction
Optical interconnections
Optical modulation
Optical switches
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Summary:Two types of micro-electro-mechanical gratings have been designed for use as optical modulators. The gratings have been fabricated and experimentally characterized, yielding excellent results. Micro-electro-mechanical gratings are possible candidates for applications such as intra-cavity switches for Q-switched lasers, or intensity modulating switches for free-space optical interconnects. Compared to commercially available acousto-optic modulators, micro-electro-mechanical gratings are smaller, weigh less, and can be manufactured in large quantities for a fraction of the cost.
ISBN:9780780329850
0780329856
DOI:10.1109/MEMSYS.1996.493984