Multislot MW Irradiator for Intracavity Treatment

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Bibliographic Details
Published in2006 8th International Conference on Actual Problems of Electronic Instrument Engineering p. 265
Main Authors Belavskaya, S.V., Rodionov, A.S., Lisityna, L.I., Plavsky, L.G., Vostryakov, Yu.V.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2006
Subjects
Biological tissues
Electrodes
Etching
Plasma applications
Plasma chemistry
Plasma devices
Plasma materials processing
Plasma properties
Silicon
Surface treatment
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ISBN:5778206623
9785778206625
DOI:10.1109/APEIE.2006.4292450