Fabrication of polymeric optical waveguides by B-staged bisbenzocyclobutene (BCB)

This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzocyclobutene (BCB) from DOW Chemical. A low cost fabrication method, chemical etching is used to form the wavegu...

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Bibliographic Details
Published in2004 IEEE International Conference on Semiconductor Electronics p. 5 pp.
Main Authors Shee Yu Gang, Kassim, N.M., Mohammad, A.B., Ibrahim, M.H.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2004
Subjects
Costs
Etching
Glass
Optical device fabrication
Optical planar waveguides
Optical polymers
Optical waveguides
Organic chemicals
Planar waveguides
Slabs
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Summary:This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzocyclobutene (BCB) from DOW Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented.
ISBN:9780780386587
0780386582
DOI:10.1109/SMELEC.2004.1620940