An ultra-compact electron-beam column

In this paper, an electron optical system with an array of columns was developed for an electron-beam addressable data storage device that has the form factor of compact flash and capacity > 10 GB. The columns were analyzed with a single Spindt emitter and a three-aperture focusing structure that...

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Bibliographic Details
Published in2005 International Vacuum Nanoelectronics Conference pp. 354 - 355
Main Authors Huei Pei Kuo, Sity Lam, Xia Sheng, Birecki, H., Naberhuis, S.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2005
Subjects
Electrodes
Electron beams
Electron emission
Electron optics
Electron sources
Focusing
Lenses
Memory
Optical arrays
Stimulated emission
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Summary:In this paper, an electron optical system with an array of columns was developed for an electron-beam addressable data storage device that has the form factor of compact flash and capacity > 10 GB. The columns were analyzed with a single Spindt emitter and a three-aperture focusing structure that focuses the beam into a 40 nm core that contains /spl sim/ 60% of the beam current and a tail that spreads to several hundred nanometers. The focusing structure and the emission characteristics for Spindt emitters were presented. An extended electron source that consists of an array of regularly or randomly distributed point emitters which consists of a randomly distributed hemi-spherical poly-silicon nodules (NPS) with 20 /spl plusmn/ 5 nm radius. The physical and electron emission characteristics of NPS were also presented. A novel electron optical column to focus the emission from the NPS extended electron source into a diameter < 30 nm was developed.
ISBN:9780780393844
0780393848
ISSN:2164-2370
DOI:10.1109/IVNC.2005.1619632