Carrier transport in Si/SiO/sub x//Si structures by direct wafer bonding

• Published in: Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on Electron Devices and Materials, 2005 pp. 37 - 38
• Main Authors: Kurkin, S.G., Plotnikov, Y.V., Efremov, M.D., Kamaev, G.N.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2005
• Subjects: Dielectrics; Electrons; Hysteresis; Photonic band gap; Resonance; Semiconductor diodes; Silicon; Tunneling; Voltage; Wafer bonding

The results of carrier transport analysis in silicon tunnel n/sup ++//spl bsol/p/sup ++/ structures made by direct wafer bonding are presented. The idea was to create tunnel transparent SiO/sub x/ layer in which electronic states could be localized at the bonding interface and double barrier tunnel...