Co-Silicide Junction Leakage and Device Characteristics in Embedded DRAM with Stack Capacitor Structure
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Published in | 29th European Solid-State Device Research Conference Vol. 1; pp. 228 - 231 |
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Main Authors | , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
Editions Frontieres
1999
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Subjects | |
Online Access | Get full text |
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ISBN: | 9782863322451 2863322451 |
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