Toxic gas response of (In,Sn)O/sub 2//Pt nanowire sensors

Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C/sub 3/H/sub 9/O/sub 3/P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH/sub 3/CN) as a simulant gas for blood gas. Sensing materials are...

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Published inThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 Vol. 2; pp. 1899 - 1902 Vol. 2
Main Authors Gi-Hong Rue, Tae-Hyun Ban, Nak-Jin Choi, Jun-Hyuk Kwak, Yeon-Tae Lim, Duk-Dong Lee, Jeung-Soo Huh
Format Conference Proceeding
LanguageEnglish
Published IEEE 2005
Subjects
Blood
Displays
Gas detectors
Gases
Nanostructures
Stability
Substrates
Thin film sensors
Tin
Transistors
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Summary:Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C/sub 3/H/sub 9/O/sub 3/P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH/sub 3/CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO/sub 2/, where Pt layer (30 /spl Aring/) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O/sub 2//Pt and SnO/sub 2//Pt, where (Sn,In)O/sub 2/ and tin oxide films are deposited on Pt layer (30 /spl Aring/) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is /spl sim/ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH/sub 3/CN. We display the results compared that of nano-wire with ordinary tin oxide sample.
ISBN:0780389948
9780780389946
ISSN:2159-547X
DOI:10.1109/SENSOR.2005.1497468