Nanomotion measurement by phase conjugate interferometry
A new interferometer design for measuring nanometer-level motion is presented. Experiments show that this new design enables motion measurement at much longer distances than the current state of the art with no loss in accuracy.
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Published in | Conference on Lasers and Electro-Optics, 2004. (CLEO) Vol. 1; p. 2 pp. vol.1 |
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Main Authors | , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
2004
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Subjects | |
Online Access | Get full text |
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Summary: | A new interferometer design for measuring nanometer-level motion is presented. Experiments show that this new design enables motion measurement at much longer distances than the current state of the art with no loss in accuracy. |
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ISBN: | 9781557527776 1557527776 |