New low temperature fetuto-second laser annealing method for TFT fabrication technology

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Bibliographic Details
Published inConference on Lasers and Electro-Optics, 2003. CLEO '03 pp. 1611 - 1613
Main Authors Zaitsev, A.K., Yi-Chao Wang, Ci-Ling Pan, Jia-Min Shieh
Format Conference Proceeding
LanguageEnglish
Published IEEE 2003
Subjects
Annealing
Crystallization
Gas lasers
Optical device fabrication
Optical films
Silicon
Substrates
Temperature
Thin film transistors
Ultrafast optics
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ISBN:1557527482
9781557527486