Mapping of Semiconductor Electrical Properties with Terahertz Time-Domain Ellipsometry

Wafer-scale mapping of the electrical conductivity properties of a 4-inch silicon carbide (SiC) wafer using terahertz time-domain ellipsometry (THz-TDE) is demonstrated.

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Published in2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) pp. 1 - 2
Main Authors Agulto, Verdad C., Iwamoto, Toshiyuki, Zhao, Zixi, Liu, Shuang, Kato, Kosaku, Nakajima, Makoto
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2024
Subjects
Conductivity
Drude
Electronics industry
Ellipsometry
facet
Failure analysis
Graphical models
Monitoring
Nondestructive testing
Production
SiC
Silicon carbide
THz-TDS
Time-domain analysis
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Abstract Wafer-scale mapping of the electrical conductivity properties of a 4-inch silicon carbide (SiC) wafer using terahertz time-domain ellipsometry (THz-TDE) is demonstrated.
AbstractList Wafer-scale mapping of the electrical conductivity properties of a 4-inch silicon carbide (SiC) wafer using terahertz time-domain ellipsometry (THz-TDE) is demonstrated.
Author Nakajima, Makoto
Iwamoto, Toshiyuki
Zhao, Zixi
Agulto, Verdad C.
Liu, Shuang
Kato, Kosaku
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  givenname: Toshiyuki
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  givenname: Zixi
  surname: Zhao
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  organization: Osaka University,Institute of Laser Engineering,Suita,Japan
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  givenname: Shuang
  surname: Liu
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  organization: Osaka University,Institute of Laser Engineering,Suita,Japan
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  givenname: Makoto
  surname: Nakajima
  fullname: Nakajima, Makoto
  email: nakajima.makoto.ile@osaka-u.ac.jp
  organization: Osaka University,Institute of Laser Engineering,Suita,Japan
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Snippet Wafer-scale mapping of the electrical conductivity properties of a 4-inch silicon carbide (SiC) wafer using terahertz time-domain ellipsometry (THz-TDE) is...
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StartPage 1
SubjectTerms Conductivity
Drude
Electronics industry
Ellipsometry
facet
Failure analysis
Graphical models
Monitoring
Nondestructive testing
Production
SiC
Silicon carbide
THz-TDS
Time-domain analysis
Title Mapping of Semiconductor Electrical Properties with Terahertz Time-Domain Ellipsometry
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