On-Chip Antennas for IC Reliability and Aging Monitoring
We propose the use of on-chip antennas for the continuous monitoring of integrated circuit aging. We focus on detecting electromigration of interconnects using near-field EM emissions by measuring the change in differential-mode coupling between the interconnects and on-chip antennas. Simulations ar...
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Published in | 2024 IEEE 67th International Midwest Symposium on Circuits and Systems (MWSCAS) pp. 1276 - 1280 |
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Main Authors | , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
11.08.2024
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Subjects | |
Online Access | Get full text |
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Summary: | We propose the use of on-chip antennas for the continuous monitoring of integrated circuit aging. We focus on detecting electromigration of interconnects using near-field EM emissions by measuring the change in differential-mode coupling between the interconnects and on-chip antennas. Simulations are performed to determine the effect of electromigration on the near-field coupling, and the on-chip antennas are fabricated and annealed to determine their compatibility with the back end of line process. |
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ISSN: | 1558-3899 |
DOI: | 10.1109/MWSCAS60917.2024.10658847 |