Exploring Nanorobotics Integration with Microwave and Millimeter-Wave Techniques for Advanced On-wafer Measurement

In the broader context of the electronics industry, the development of new on-wafer characterization techniques and instruments is imperative for precise validation of circuits designed for high-frequency (HF) applications. Advancing the miniaturization of HF devices necessitates addressing new metr...

Full description

Saved in:
Bibliographic Details
Published in2024 5th International Conference in Electronic Engineering, Information Technology & Education (EEITE) pp. 1 - 6
Main Authors Mokthari, Cerine, Lenoir, Clement, Sebbache, Mohamed, Boyaval, Christophe, Berthe, Maxime, Dambrine, Gilles, Haddadi, Kamel
Format Conference Proceeding
LanguageEnglish
Published IEEE 29.05.2024
Subjects
Atmospheric measurements
Hafnium
Microwave measurement
microwaves
Millimeter wave measurements
millimeter-waves
Nanopositioning
nanorobotics
Network analyzers
On-wafer measurement
Service robots
Online AccessGet full text

Cover

More Information
Summary:In the broader context of the electronics industry, the development of new on-wafer characterization techniques and instruments is imperative for precise validation of circuits designed for high-frequency (HF) applications. Advancing the miniaturization of HF devices necessitates addressing new metrological challenges related to dimensional and electrical characterization. To tackle these challenges, a new fully automated and robotic on-wafer probe station was conceived and constructed from scratch. The measurement probes and the chuck hosting the DUT are mounted on SmarAct® piezoelectric nano-positioners. Integration of a Keysight® Streamline vector network analyzer into the station offers a compact solution close to the probes, reducing non-systematic errors arising from environmental variations. This work is centered on the mechanical aspects necessary for achieving exemplary fine control of probe movements, which are essential for future system automation.
DOI:10.1109/EEITE61750.2024.10654413