High-Resolution and Compact Integrated FMCW-LiDAR Chip with 128 Channels of Slow Light Grating Antennas

This paper introduces compact solid-state optical beam scanning technology, slow light grating (SLG) based on photonic crystal waveguide. We implemented the successful implementation of a frequency modulated continuous wave (FMCW) LiDAR chip, featuring 128 channels equipped with the developed SLG an...

Full description

Saved in:
Bibliographic Details
Published in2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) pp. 1 - 2
Main Authors Maeda, Y., Ebiko, Y., Terada, H., Tetsuya, R., Maeda, S., Yasu, Y., Tamanuki, T., Kamata, M., Hirotani, K., Suyama, S., Yamamoto, K., Nawa, S., Kubota, R., Baba, T.
Format Conference Proceeding
LanguageEnglish
Published IEEE 16.06.2024
Subjects
Antenna measurements
FMCW
LiDAR
Meters
photonic crystal waveguide
Photonic crystals
Point cloud compression
Semiconductor device measurement
Slow light
slow light grating
Very large scale integration
Online AccessGet full text

Cover

More Information
Summary:This paper introduces compact solid-state optical beam scanning technology, slow light grating (SLG) based on photonic crystal waveguide. We implemented the successful implementation of a frequency modulated continuous wave (FMCW) LiDAR chip, featuring 128 channels equipped with the developed SLG antennas. Our design incorporates an upward radiating structure in an antenna array with a fine pitch of 40 μm and a total footprint of 5.14 mm × 1.20 mm, respectively. Using this chip, we successfully performed a FMCW measurements and point cloud mapping.
ISSN:2158-9682
DOI:10.1109/VLSITechnologyandCir46783.2024.10631388