Temperature Effect on the Optical Characteristics of a Microoptoelectromechanical Accelerometer

• Published in: 2024 IEEE 25th International Conference of Young Professionals in Electron Devices and Materials (EDM) pp. 40 - 44
• Main Authors: Barbin, Evgenij S., Nesterenko, Tamara G., Koleda, Aleksej N., Talovskaia, Alena A., Kulinich, Ivan V., Mokhovikov, Denis M.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 28.06.2024
• Subjects: accelerometer; directional coupler; MOEM; Optical coupling; Optical resonators; optical transmission coefficient; optical tunneling effect; Optical variables measurement; resonator; Temperature distribution; temperature error; Temperature measurement; temperature sensitivity; Temperature sensors; Transducers
• ISSN: 2325-419X
• DOI: 10.1109/EDM61683.2024.10615062

The treatise studies the temperature sensitivity of the optical transmission coefficient of an microoptoelectromechanical accelerometer (MOEMA) based on the optical tunneling effect in a temperature range from minus 40^{\circ} \mathrm{C} to plus 100^{\circ} \mathrm{C}. Two types of optical measuring transducers are studied: based on a directional coupler or a resonator. It is shown that the major contribution to the temperature error of the MOEMA's transmission coefficient is made by the alteration of the optical transmission coefficient (OTC). For a measuring transducer based on a directional coupler, the temperature sensitivity of the OTC amounted to 0.00058{ }^{\circ} \mathrm{C}^{-1}. That for a transducer based on a resonator amounted to 0.33{ }^{\circ} \mathrm{C}^{-1}, which definitely speaks of its inability to operate without a thermostatic system. Following the results, the contribution of the refraction index alteration depending on temperature more than 5 times exceeds that of the MOEMA's mechanical parameters for optical measuring transducers based on the directional coupler and more than 3000 times for the resonator.