Parameter Optimization for Amplitude-Modulated Resonant Mems Sensors Featuring Blue Sideband Excitation

This paper reports a strategy for further improving the sensitivity and resolution of amplitude-modulated (AM) resonant MEMS sensors subject to blue-sideband excitation (BSE). The implementation of BSE on a vacuum-packaged resonant accelerometer demonstrates that the AM sensitivity changes with a ra...

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Bibliographic Details
Published inInternational Solid-State Sensors, Actuators and Microsystems Conference (Online) pp. 1597 - 1600
Main Authors Xi, Jingqian, Xu, Lei, Xiong, Xingyin, Zou, Xudong, Li, Chengxin, Hu, Fangjing, Wang, Yuan, Liu, Huafeng, Zhao, Chun
Format Conference Proceeding
LanguageEnglish
Published IEEJ 25.06.2023
Subjects
Accelerometers
Amplitude modulation
Blue-sideband excitation
Micromechanical devices
Noise
Resonant frequency
resonant MEMS sensor
Sensitivity
Transducers
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Summary:This paper reports a strategy for further improving the sensitivity and resolution of amplitude-modulated (AM) resonant MEMS sensors subject to blue-sideband excitation (BSE). The implementation of BSE on a vacuum-packaged resonant accelerometer demonstrates that the AM sensitivity changes with a range of BSE parameters, i.e., the amplitude and frequency of the BSE signal. Therefore, optimized BSE parameters are employed for improved performance of the resonant accelerometer. As a result, the AM sensitivity can be enhanced by over 8-fold, from 1.2 V/g to 9.7 V/g; and the noise floor can be reduced by approximately 85%, from 16 μg/rtHz to 2.5 μg/rtHz, compared to raw BSE without optimization. This work shows a further investigation of BSE and represents an important step toward further advancing AM-based resonant MEMS sensors, including but not limited to atomic force microscopy (AFM).
ISSN:2167-0021