Multi-ion Sensor Chip for Healthcare Applications

This work presents a multi-ion sensor fabricated on a single chip by combining wafer scale process and fluid dispensing method, that allows large scale production for personalized diagnostic monitoring applications. The sensor is based on solid-contact ion-selective electrodes made of a stack of a A...

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Bibliographic Details
Published in2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) pp. 1168 - 1171
Main Authors Dam, Van Anh T., Zevenbergen, Marcel A. G.
Format Conference Proceeding
LanguageEnglish
Published IEEJ 25.06.2023
Subjects
Degradation
Electrodes
Fluids
healthcare
multi-ion sensing
polyaniline
Semiconductor device measurement
Sensitivity
Solid-contact ion-selective electrode
Temperature sensors
Transducers
wafer scale process
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Summary:This work presents a multi-ion sensor fabricated on a single chip by combining wafer scale process and fluid dispensing method, that allows large scale production for personalized diagnostic monitoring applications. The sensor is based on solid-contact ion-selective electrodes made of a stack of a Au electrode, polyaniline (PANI) based transduction layer and ion-selective membrane. Sodium and potassium-selective electrodes have been fabricated and showed an initial sensitivity of 54.8 ± 2.2 mV/decade and 56.4 ± 2.3 mV/decade, respectively, that are typically reported in literature (> 52 mV/decade). During 45-day storage in normal ambient condition, the sodium-selective electrode showed an average sensitivity of 50.8 ± 3.4 mV/decade without measurable degradation.
ISSN:2167-0021