A Novel Water-Immersible Metal Micro Scanning Mirror Based on Zigzag Beam Structure
This paper reports a novel water-immersible micro scanning mirror, characterized by the metal manufacturing, easy assembly and low cost. Compared with flexible polymers, metal material is easier to process and more likely to maintain long-term stability of physical properties. By adopting the zigzag...
Saved in:
Published in | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) pp. 1413 - 1416 |
---|---|
Main Authors | , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEJ
25.06.2023
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | This paper reports a novel water-immersible micro scanning mirror, characterized by the metal manufacturing, easy assembly and low cost. Compared with flexible polymers, metal material is easier to process and more likely to maintain long-term stability of physical properties. By adopting the zigzag beam structure and electromagnetic driving scheme, the metal micro scanning mirror can realize an optical angle greater than 30° in the air and greater than 18° underwater at low resonant frequency. Besides, a combined action mechanism of nonlinear damping and nonlinear magnetic driving force is proposed to explain the scanning characteristics of the scanning mirror in the air and underwater. |
---|---|
ISSN: | 2167-0021 |