A Novel Water-Immersible Metal Micro Scanning Mirror Based on Zigzag Beam Structure

This paper reports a novel water-immersible micro scanning mirror, characterized by the metal manufacturing, easy assembly and low cost. Compared with flexible polymers, metal material is easier to process and more likely to maintain long-term stability of physical properties. By adopting the zigzag...

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Bibliographic Details
Published in2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) pp. 1413 - 1416
Main Authors Tu, Er-Qi, Deng, Xin-Lu, Fang, Xiao-Yong, Yu, Sen-Yuan, Kong, Xiang-Hao, Liang, Jia-Zhe, Zhang, Wen-Ming
Format Conference Proceeding
LanguageEnglish
Published IEEJ 25.06.2023
Subjects
Damping
Easy Assembly
Force
Metal Micro Scanning Mirror
Metals
Mirrors
Nonlinear Analysis
Nonlinear magnetics
Optical device fabrication
Resonant frequency
Water-Immersible
Zigzag Beam
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Summary:This paper reports a novel water-immersible micro scanning mirror, characterized by the metal manufacturing, easy assembly and low cost. Compared with flexible polymers, metal material is easier to process and more likely to maintain long-term stability of physical properties. By adopting the zigzag beam structure and electromagnetic driving scheme, the metal micro scanning mirror can realize an optical angle greater than 30° in the air and greater than 18° underwater at low resonant frequency. Besides, a combined action mechanism of nonlinear damping and nonlinear magnetic driving force is proposed to explain the scanning characteristics of the scanning mirror in the air and underwater.
ISSN:2167-0021