BEOL Compatible (< 400 °C) Novel Cross-Point RRAM Based Resistive Hydrogen Sensor for Downstream Hydrogen Use

• Published in: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) pp. 1939 - 1941
• Main Authors: Samanta, Subhranu, Chen, Zhixian, Ng, Doris K. T., Chen, Weiguo, Xu, Linfang, Kai, Fuu Ming, Zhu, Yao
• Format: Conference Proceeding
• Language: English
• Published: IEEJ 25.06.2023
• Subjects: Cross-point RRAM; Hydrogen; Hydrogen sensor; Insulators; Low thermal budget; Micromechanical devices; Oxidation; Temperature sensors; Thermal resistance; Transducers

We present a novel Pd/Ta 2 O 5 /TiW cross-point resistive random-access memory (RRAM) based hydrogen gas (H 2 ) leakage sensor with a low thermal budget (< 400 °C). This cost-effective, low power cross-point RRAM device with Pd sensing electrode and atomic layer deposited (ALD) Ta 2 O 5 layer ena...