Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics

We demonstrate highly-doped Er 3+ and Yb 3+ doped gain media on SiN waveguides by plasma-enhanced atomic layer deposition, showing great potential for integrated lasers and amplifiers.

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Bibliographic Details
Published in2023 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2
Main Authors Liapis, Andreas C., Pelgrin, Vincent, Liu, Peng, Cui, Xiaoqi, Rosa, Jose M.A., Seppannen, Heli, Li, Diao, Reduto, Igor, Honkanen, Seppo, Lipsanen, Harri, Sun, Zhipei
Format Conference Proceeding
LanguageEnglish
Published OSA 01.05.2023
Subjects
Atom lasers
Atomic beams
Atomic layer deposition
Electric potential
Electro-optical waveguides
Media
Waveguide lasers
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Summary:We demonstrate highly-doped Er 3+ and Yb 3+ doped gain media on SiN waveguides by plasma-enhanced atomic layer deposition, showing great potential for integrated lasers and amplifiers.