Improvement of Potassium-Ion SiO2 Electret Potential by Controlling Flowrate in Oxidation Process

Potassium-ion silicon electret (K-SiO 2 ) is a promising material for electrostatic type vibrational energy harvesting device enabled by micro-electro-mechanical system (VEH-MEMS). The power generation of VEH-MEMS can be enhanced by increasing the potential of electret. In this work, we report an im...

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Bibliographic Details
Published in2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) pp. 282 - 285
Main Authors Putra, Refaldi I.D., Ozawa, Takahiro, Honma, Hiroaki, Fukutani, Katsuyuki, Toshiyoshi, Hiroshi
Format Conference Proceeding
LanguageEnglish
Published IEEE 12.12.2022
Subjects
controlled oxidation
Electric potential
electrostatic vibrational energy harvesting device
Energy harvesting
K-SiO 2 electret
Microelectromechanical systems
Oxidation
Process control
Silicon
Silicon compounds
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Summary:Potassium-ion silicon electret (K-SiO 2 ) is a promising material for electrostatic type vibrational energy harvesting device enabled by micro-electro-mechanical system (VEH-MEMS). The power generation of VEH-MEMS can be enhanced by increasing the potential of electret. In this work, we report an improvement of 49.3% in potential of K-SiO 2 electret thin film compared to the existing method. This is achieved by controlling the feed gas flowrate during wet oxidation process and applying vacuum annealing before charging process.
DOI:10.1109/PowerMEMS56853.2022.10007571