First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles

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Bibliographic Details
Published inMicroelectronic engineering Vol. 207; pp. 7 - 14
Main Authors Toloshniak, T., Guhel, Y., Besq, A., Boudart, B.
Format Journal Article
LanguageEnglish
Published Elsevier 01.02.2019
Subjects
Engineering Sciences
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ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2018.11.013