Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers
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Published in | ACS applied materials & interfaces Vol. 13; no. 9; pp. 11224 - 11236 |
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Main Authors | , , , , , , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Washington, D.C. : American Chemical Society
10.03.2021
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Subjects | |
Online Access | Get full text |
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ISSN: | 1944-8244 1944-8252 |
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DOI: | 10.1021/acsami.1c00694 |