Nanometer scale active ground motion isolator

Vibration isolation is a critical issue in various precision engineering fields. A new design of an activeisolation system operating heavy loads (up to 50 kg) is presented in this work. This system provides stateof the art vibration isolation at the nanometer scale for magnets of a future particle a...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 204; pp. 96 - 106
Main Authors Le Breton, Ronan, Deleglise, Guillaume, Allibe, Julie, Badel, Adrien, Balik, Gaël, Caron, Bernard, Jeremie, Andréa, Lottin, Jacques, Vilalte, Sébastien
Format Journal Article
LanguageEnglish
Published Elsevier 15.12.2013
Subjects
Engineering Sciences
Mechanical engineering
Mechanics
Physics
Active vibration
isolation Nanometer
Ground motion
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Summary:Vibration isolation is a critical issue in various precision engineering fields. A new design of an activeisolation system operating heavy loads (up to 50 kg) is presented in this work. This system provides stateof the art vibration isolation at the nanometer scale for magnets of a future particle accelerator and is more compact than other studies in this field. The choice of sensors and actuators, the mechanical designand the acquisition electronics are investigated in order to reject ground motion efficiently. A dynamic experimental characterization is performed. Based on the identified model, a specific controller, givingan attenuation between 10 Hz and 100 Hz was designed and experimentally qualified.
ISSN:0924-4247
1873-3069