Improvement of dielectric properties of BLT thin films deposited by magnetron sputtering - art. no. 012006

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 94
Main Authors Besland, Marie-Paule, Borderon, C., Barroy, P.R.J., Le Tacon, S., Richard-Plouet, Mireille, Averty, D., Tessier, Pierre-Yves, Gundel, H.W., Brohan, Luc, Djouadi, M. A.
Format Journal Article
LanguageEnglish
Published IOP Science 2008
Subjects
Condensed Matter
Materials Science
Physics
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ISSN:1742-6596
1742-6588
DOI:10.1088/1742-6596/94/1/012006