Correlation between plasma chemistry, microstructure and electronic properties of Si:H thin films prepared by hydrogen dilution

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Bibliographic Details
Published inJournal of non-crystalline solids Vol. 338-340
Main Authors Chaudhuri, P., Das, D., Ray, P.P., Dutta Gupta, Namita, Roy, Dhananjoy, Longeaud, Christophe
Format Journal Article
LanguageEnglish
Published Elsevier 2004
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ISSN:0022-3093