Highly Sensitive Force Sensor Based on High-Q Asymmetric V-Shaped CaF[sub.2] Resonator

• Published in: Micromachines (Basel) Vol. 15; no. 6
• Main Authors: Wang, Deyong, Rong, Jiamin, Li, Jianglong, Yue, Hongbo, Liu, Wenyao, Xing, Enbo, Tang, Jun, Liu, Jun
• Format: Journal Article
• Language: English
• Published: MDPI AG 01.06.2024
• Subjects: Nitrides; Semiconductors; Sensors
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi15060751

Whispering gallery mode (WGM) resonators have high-quality factors and can be used in high-sensitivity sensors due to the narrow line width that allows for the detection of small external changes. In this paper, a force-sensing system based on a high-Q asymmetric V-shaped CaF[sub.2] resonator is proposed. Based on the dispersion coupling mechanism, the deformation of the resonator is achieved by loading force, and the resonant frequency is changed to determine the measurement. By adjusting the structural parameters of the asymmetric V-shaped resonator, the deformation of the resonator under force loading is improved. The experimental results show that the sensitivity of the V-shaped tip is 18.84 V/N, which determines the force-sensing resolution of 8.49 μN. This work provides a solution for force-sensing measurements based on a WGM resonator.