Thermochemical study of new volatile palladium [beta]-ketohydrazonates for CVD application

The volatile palladium(II) and copper(II) {O,N}-coordinated bis-chelate complexes of a new type, Pd(dmht).sub.2 and Cu(dmht).sub.2, where dmht = 1,1,1-trifluoro-2-(2,2-dimethylhydrazone)pentan-4-onato, were synthesized, purified and identified by elemental analysis, IR and NMR spectroscopy and mass...

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Bibliographic Details
Published inJournal of thermal analysis and calorimetry Vol. 136; no. 6; p. 2341
Main Authors Shushanyan, Artem D, Nikolaeva, Nataliya S, Vikulova, Evgeniia S, Zelenina, Ludmila N, Trubin, Sergey V, Sysoev, Sergey V, Dorovskikh, Svetlana I
Format Journal Article
LanguageEnglish
Published Springer 01.06.2019
Subjects
Chemical vapor deposition
Copper compounds
Dielectric films
Mass spectrometry
Nuclear magnetic resonance spectroscopy
Palladium
Thin films
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Summary:The volatile palladium(II) and copper(II) {O,N}-coordinated bis-chelate complexes of a new type, Pd(dmht).sub.2 and Cu(dmht).sub.2, where dmht = 1,1,1-trifluoro-2-(2,2-dimethylhydrazone)pentan-4-onato, were synthesized, purified and identified by elemental analysis, IR and NMR spectroscopy and mass spectrometry. The thermal behavior of the complexes in the condensed phase was studied by TG-DTA and DSC methods. The temperature dependences of saturated vapor pressure were measured for Pd(dmht).sub.2 and Cu(dmht).sub.2 in the temperature ranges [DELTA]T = (343-388) K (flow method) and [DELTA]T = (321-390) K (flow and Knudsen effusion method), respectively. The ketohydrazonate complexes characterized by close enthalpy and entropy of melting and sublimation processes and the highest volatility among the related compounds. The new complexes were successfully used as precursors for metal-organic chemical vapor deposition of mono- and bimetallic thin films onto Si (100) substrates at the reducing atmosphere.
ISSN:1388-6150
1588-2926
DOI:10.1007/s10973-018-7895-2