METHOD AND APPARATUS FOR IMAGING OF FEATURES ON A SUBSTRATE

A method for imaging features on a substrate, comprising scanning the substrate and producing an image thereof, overlaying a grid model on the image, fitting the grid model to the locations of at least some of the features on the image, and extracting images of the features.

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Bibliographic Details
Main Authors GENOVESIO AUGUSTE, EMANS NEIL
Format Patent
LanguageEnglish
Published 28.05.2014
Subjects
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Summary:A method for imaging features on a substrate, comprising scanning the substrate and producing an image thereof, overlaying a grid model on the image, fitting the grid model to the locations of at least some of the features on the image, and extracting images of the features.
Bibliography:Application Number: ZA20110000120