METHOD OF MANUFACTURING SENSOR AND RESISTOR ELEMENT

A sensor comprising a resistor element (2) with an upper electrode and a lower electrode, and a field-effect transistor element (3) with a gate electrode (6) on its back, wherein the gate electrode (6) is connected electrically with a part of the upper electrode of the resistor element (2), and the...

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Bibliographic Details
Main Authors NOMURA, KOJI, UMEDA, SHINJI, FUJII, HIROSHI, MASUTANI, TAKESHI, IBATA, AKIHIKO
Format Patent
LanguageEnglish
French
Japanese
Published 02.12.1999
Edition6
Subjects
ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS
COLORIMETRY
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
PHYSICS
RADIATION PYROMETRY
TARIFF METERING APPARATUS
TESTING
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Summary:A sensor comprising a resistor element (2) with an upper electrode and a lower electrode, and a field-effect transistor element (3) with a gate electrode (6) on its back, wherein the gate electrode (6) is connected electrically with a part of the upper electrode of the resistor element (2), and the lower electrode of the resistor element (2) is connected electrically with a ground electrode (12) on a substrate. L'invention concerne un capteur comprenant un élément de résistance (2) présentant une électrode supérieure et une électrode inférieure, ainsi qu'un élément de transistor (3) à effet de champ présentant une électrode de grille (6) sur sa partie arrière, l'électrode de grille (6) étant connectée électriquement à une partie de l'électrode supérieure de l'élément de résistance (2) et l'électrode inférieure de l'élément de résistance (2) étant connectée électriquement à une électrode de masse (12) sur un substrat.
Bibliography:Application Number: WO1999JP02665