PARALLEL PLATE STRUCTURE PROVIDED WITH PZT THIN-FILM BIMORPH AND METHOD OF FABRICATION THEREOF

• Main Authors: IWATA, HITOSHI, FUKUDA, TOSHIO, ARAI, FUMIHITO, ITOIGAWA, KOICHI
• Format: Patent
• Language: English; French; Japanese
• Published: 14.01.1999
• Edition: 6
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRONIC CIRCUITRY; CHEMISTRY; CRYSTAL GROWTH; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; RESONATORS; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

A parallel plate structure (1) is provided with a pair of bimorph piezoelectric elements (2) and prismatic insulation spacers (3) inserted between the piezoelectric elements (2) at the upper and lower ends thereof for cementing the piezoelectric elements (2) together via the spacers (3). Each piezoe...