METHOD AND DEVICE FOR CLEANING AND ACTIVATING ELECTRICALLY CONDUCTIVE STRUCTURES AND CIRCUIT BOARDS

• Main Authors: NEIGER, MANFRED, LANG, JUERGEN, E
• Format: Patent
• Language: English; French; German
• Published: 05.11.1998
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; METALLURGY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; PRINTED CIRCUITS; TRANSPORTING

Die Erfindung betrifft ein Verfahren zum Reinigen oder Aktivieren elektrisch leitender, strukturierter Schichten. Erfindungsgemäss wird vorgeschlagen, dass hierzu eine dielektrisch behinderte Entladung verwendet wird. The invention relates to a method for cleaning or activating electrically conductive structured layers. According to the invention, a dielectrically impeded discharge is used for this purpose. L'invention concerne un procédé pour le nettoyage ou l'activation de couches électroconductrices structurées. Selon l'invention, il est prévu d'utiliser à cet effet une décharge inhibée diélectriquement.