INTERNALLY COOLED TARGET ASSEMBLY FOR MAGNETRON SPUTTERING

An internally cooled target assembly for use in a magnetron sputtering apparatus is provided. The internally cooled target assembly includes a cooling plate that is configured to promote highly turbulent coolant flow through the target assembly to achieve efficient and uniform target cooling. The vo...

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Bibliographic Details
Main Authors HARRA, DAVID, J, JIANG, MINGWEI, HARTSOUGH, LARRY, D, COCHRAN, RONALD, R
Format Patent
LanguageEnglish
French
Published 27.08.1998
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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