INTERNALLY COOLED TARGET ASSEMBLY FOR MAGNETRON SPUTTERING
An internally cooled target assembly for use in a magnetron sputtering apparatus is provided. The internally cooled target assembly includes a cooling plate that is configured to promote highly turbulent coolant flow through the target assembly to achieve efficient and uniform target cooling. The vo...
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| Main Authors | , , , |
|---|---|
| Format | Patent |
| Language | English French |
| Published |
27.08.1998
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| Edition | 6 |
| Subjects | |
| Online Access | Get full text |
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| Abstract | An internally cooled target assembly for use in a magnetron sputtering apparatus is provided. The internally cooled target assembly includes a cooling plate that is configured to promote highly turbulent coolant flow through the target assembly to achieve efficient and uniform target cooling. The volume of coolant required to cool the target assembly is minimized.
L'invention concerne un ensemble cible intérieurement refroidi destiné à être utilisé dans un appareil de pulvérisation au magnétron. L'ensemble cible intérieurement refroidi comprend une plaque de refroidissement agencée de manière à favoriser l'écoulement hautement turbulent d'un fluide de refroidissement, afin d'effectuer un refroidissement efficace et uniforme de la cible. Le volume de fluide de refroidissement requis pour refroidir l'ensemble cible est réduit. |
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| AbstractList | An internally cooled target assembly for use in a magnetron sputtering apparatus is provided. The internally cooled target assembly includes a cooling plate that is configured to promote highly turbulent coolant flow through the target assembly to achieve efficient and uniform target cooling. The volume of coolant required to cool the target assembly is minimized.
L'invention concerne un ensemble cible intérieurement refroidi destiné à être utilisé dans un appareil de pulvérisation au magnétron. L'ensemble cible intérieurement refroidi comprend une plaque de refroidissement agencée de manière à favoriser l'écoulement hautement turbulent d'un fluide de refroidissement, afin d'effectuer un refroidissement efficace et uniforme de la cible. Le volume de fluide de refroidissement requis pour refroidir l'ensemble cible est réduit. |
| Author | JIANG, MINGWEI HARTSOUGH, LARRY, D HARRA, DAVID, J COCHRAN, RONALD, R |
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| DocumentTitleAlternate | ENSEMBLE CIBLE INTERIEUREMENT REFROIDI DESTINE A UN DISPOSITIF DE PULVERISATION AU MAGNETRON |
| Edition | 6 |
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| Notes | Application Number: WO1998US02657 |
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| PublicationDate | 19980827 |
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| RelatedCompanies | NOVELLUS SYSTEMS, INC |
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| Snippet | An internally cooled target assembly for use in a magnetron sputtering apparatus is provided. The internally cooled target assembly includes a cooling plate... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| Title | INTERNALLY COOLED TARGET ASSEMBLY FOR MAGNETRON SPUTTERING |
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