INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM

An instrument which is used for handling substrates in a clean room maintained at a room temperature under the atmospheric pressure and contains a resin basic material and at least one additive selected from among a group composed of a lubricant, plasticizer, an antioxidant and an antistatic agent....

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Main Authors WAKAYAMA, YOSHIHIDE, SAITO, MISAKO, MATSUO, TAKENOBU, WAKABAYASHI, TSUYOSHI, IMAFUKU, MASAYUKI, KOBAYASHI, SADAO
Format Patent
LanguageEnglish
French
Japanese
Published 09.10.1997
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
CHARACTERISTIC FEATURES OF FOOTWEAR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FOOTWEAR
HUMAN NECESSITIES
PARTS OF FOOTWEAR
SEMICONDUCTOR DEVICES
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Summary:An instrument which is used for handling substrates in a clean room maintained at a room temperature under the atmospheric pressure and contains a resin basic material and at least one additive selected from among a group composed of a lubricant, plasticizer, an antioxidant and an antistatic agent. The additive does not generate any gaseous organic component under the conditions of a room temperature and the atmospheric pressure. Instrument utilisé pour la manipulation de substrats dans une sale blanche maintenue à température ambiante et sous pression atmosphérique et contenant un matériau de base en résine, ainsi qu'au moins un additif sélectionné dans un groupe composé d'un lubrifiant, d'un plastifiant, d'un antioxydant et d'un agent antistatique. Cet additif ne génère aucun constituant organique gazeux dans des conditions de température ambiante et de pression atmosphérique.
Bibliography:Application Number: WO1997JP01039