PROCESS FOR FABRICATING INTEGRATED OPTICAL DEVICES ON LITHIUM NIOBATE

• Main Authors: HOLMES, RONALD, JAMES, ALEXANDER, KIM, YOU, SONG, O'BRYAN, HENRY, MILES, JR
• Format: Patent
• Language: English
• Published: 20.11.1986
• Edition: 4
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; METALLURGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

A process for producing optical integrated circuits on lithium niobate substrates in which the composition of the lithium niobate substrates is adjusted by a powder bed equilibration procedure. This procedure involved exposure of the lithium niobate crystals to a powder bed in a crucible during a heat treatment. A similar procedure is used during production of optical integrated circuits to maintain the desired Li/Nb composition in the substrate. Processus de production de circuits intégrés optiques sur des substrats de niobate de lithium, dans lequel la composition des substrats de niobate de lithium est ajustée par un procédé d'équilibrage à lit pulvérulent. Ce procédé consiste à exposer les cristaux de niobate de lithium à un lit pulvérulent dans un creuset pendant un traitement thermique. Un procédé similaire est utilisé pendant la production de circuits intégrés optiques pour maintenir le rapport Li/Nb désiré dans le substrat.