VACUUM PUMP

A vacuum pump comprising: a stator (114), the stator comprising one or more stator walls (122,124,126) defining a pumping chamber (118); and a heat transfer device (130) coupled to the one or more stator walls (122,124,126), the heat transfer device (130) comprising: a thermally conductive body (126...

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Bibliographic Details
Main Authors KIM, YoungMin, NORTH, Michael Henry, YOU, YoungHyun, LONG, Cainan, WICKES, Matthew Richard, KAILASAM, Sivabalan, SONG, Wonsik
Format Patent
LanguageEnglish
French
Published 10.10.2024
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Summary:A vacuum pump comprising: a stator (114), the stator comprising one or more stator walls (122,124,126) defining a pumping chamber (118); and a heat transfer device (130) coupled to the one or more stator walls (122,124,126), the heat transfer device (130) comprising: a thermally conductive body (126;500); and a conduit (132) through the thermally conductive body and through which, in use, a purge gas is passed whereby to heat the purge gas. Pompe à vide comprenant : un stator (114), le stator comprenant une ou plusieurs parois de stator (122, 124, 126) définissant une chambre de pompage (118) ; et un dispositif de transfert de chaleur (130) couplé à la ou aux parois de stator (122, 124, 126), le dispositif de transfert de chaleur (130) comprenant : un corps thermoconducteur (126 ; 500) ; et un conduit (132) à travers le corps thermoconducteur et par lequel, lors de l'utilisation, un gaz de purge est amené à circuler, ce qui permet de chauffer le gaz de purge.
Bibliography:Application Number: WO2024GB50883