CLUSTER TOOL

• Main Authors: SEGUCHI, Taisei, AMIKURA, Norihiko
• Format: Patent
• Language: English; French; Japanese
• Published: 03.10.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Provided is a cluster tool comprising a plasma treatment device and a mobile replacement device. The plasma treatment device comprises: a plasma treatment module having a first surface and a second surface; and a vacuum conveyance module connected to the plasma treatment module at the first surface....