PLASMA SPRAY DEVICE AND PLASMA PROCESSING METHOD
This plasma spray device comprises: an electrode which converts a processing gas into plasma by means of electrical discharge; and a nozzle for spraying a plasma gas that has been obtained through plasma conversion, wherein the plasma gas is sprayed in an annular shape along an inner wall surface of...
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Main Authors | , |
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Format | Patent |
Language | English French Japanese |
Published |
02.08.2024
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Subjects | |
Online Access | Get full text |
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Summary: | This plasma spray device comprises: an electrode which converts a processing gas into plasma by means of electrical discharge; and a nozzle for spraying a plasma gas that has been obtained through plasma conversion, wherein the plasma gas is sprayed in an annular shape along an inner wall surface of the nozzle.
Ce dispositif de pulvérisation de plasma comprend : une électrode qui convertit un gaz de traitement en plasma au moyen d'une décharge électrique ; et une buse pour pulvériser un plasma gazeux qui a été obtenu par conversion en plasma, le plasma gazeux étant pulvérisé sous une forme annulaire le long d'une surface de paroi interne de la buse.
放電により処理ガスをプラズマ化させる電極と、プラズマ化されたプラズマガスを噴出するノズルと、を備え、ノズルの内壁面に沿って環状にプラズマガスを噴出するプラズマ噴出装置。 |
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Bibliography: | Application Number: WO2023JP02307 |