OXIDATION MEASUREMENT DEVICE AND METHOD

An oxidation measurement device according to an embodiment comprises: a light source unit for providing light to an object to be inspected; a light reception unit for receiving light reflected or scattered from the object to be inspected; and an acquisition unit, which uses the light received throug...

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Bibliographic Details
Main Author KWON, Ji Na
Format Patent
LanguageEnglish
French
Korean
Published 18.07.2024
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Summary:An oxidation measurement device according to an embodiment comprises: a light source unit for providing light to an object to be inspected; a light reception unit for receiving light reflected or scattered from the object to be inspected; and an acquisition unit, which uses the light received through the light reception unit so as to acquire information about the properties of the object to be inspected, wherein: the object to be inspected is a circuit board including a circuit pattern and an insulation layer, which is arranged on the circuit pattern and has a via hole; and the light source unit provides the light to the surface of the circuit pattern, which overlaps the via hole in the vertical direction. Un dispositif de mesure d'oxydation selon un mode de réalisation comprend : une unité de source de lumière pour fournir de la lumière à un objet à inspecter ; une unité de réception de lumière pour recevoir la lumière réfléchie ou diffusée à partir de l'objet à inspecter ; et une unité d'acquisition, qui utilise la lumière reçue à travers l'unité de réception de lumière de façon à acquérir des informations concernant les propriétés de l'objet à inspecter : l'objet à inspecter est une carte de circuit imprimé comprenant un motif de circuit et une couche d'isolation, qui est disposée sur le motif de circuit et a un trou d'interconnexion ; et l'unité de source de lumière fournit la lumière à la surface du motif de circuit, qui chevauche le trou d'interconnexion dans la direction verticale. 실시 예에 따른 산화도 측정 장치는 검사 대상물로 빛을 제공하는 광원부; 상기 검사 대상물로부터 반사 또는 산란되는 빛을 수신하는 수광부; 및 상기 수광부를 통해 수신된 빛을 이용하여 상기 검사 대상물의 특성에 대한 정보를 획득하는 획득부를 포함하고, 상기 검사 대상물은 회로 패턴, 및 상기 회로 패턴 상에 배치되고 비아 홀을 구비한 절연층을 포함하는 회로 기판이고, 상기 광원부는 상기 비아 홀과 수직 방향을 따라 중첩된 회로 패턴의 표면으로 상기 빛을 제공한다.
Bibliography:Application Number: WO2024KR00415