TILT-COLUMN MULTI-BEAM ELECTRON MICROSCOPY SYSTEM AND METHOD

A system and method of a tilt-column electron beam imaging system is disclosed. The system may include an imaging sub-system. The imaging sub-system may include a plurality of electron beam sources configured to generate a plurality of beamlets. The imaging sub-system may further include a plurality...

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Bibliographic Details
Main Authors JIANG, Xinrong, JIANG, Youfei, NYFFENEGGER, Ralph, STEIGERWALD, Michael
Format Patent
LanguageEnglish
French
Published 10.05.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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